Intrinsic Point Defects, Impurities, and Their Diffusion in Silicon PDF ePub eBook

Books Info:

Intrinsic Point Defects, Impurities, and Their Diffusion in Silicon free pdf Basically all properties of semiconductor devices are influenced by the distribution of point defects in their active areas. This book contains the first comprehensive review of the properties of intrinsic point defects, acceptor and donor impurities, isovalent atoms, chalcogens, and halogens in silicon, as well as of their complexes. Special emphasis is placed on compiling the structures, energetic properties, identified electrical levels and spectroscopic signatures, and the diffusion behavior from experimental and theoretical investigations. In addition, the book discusses the fundamental concepts of silicon and its defects, the electron system, diffusion, thermodynamics, and reaction kinetics which form the scientific basis needed for a thorough understanding of the text. Therefore, the book is able to provide an introduction to newcomers in this field up to a comprehensive reference for experts in process technology, solid-state physics, and simulation of semiconductor processes.

About Peter Pichler

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Details Book

Author : Peter Pichler
Publisher : Springer Verlag GmbH
Data Published : 02 June 2004
ISBN : 3211206876
EAN : 9783211206874
Format Book : PDF, Epub, DOCx, TXT
Number of Pages : 700 pages
Age + : 15 years
Language : English
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    Books Download ePub. Basically all properties of semiconductor devices are influenced by the distribution of point defects in their active areas. This book contains the first comprehensive review of t